Please use this identifier to cite or link to this item: https://ir.swu.ac.th/jspui/handle/123456789/14172
ชื่อเรื่อง: NO2-sensing properties of WO3 nanorods prepared by glancing angle DC magnetron sputtering
ผู้แต่ง: Horprathum M.
Limwichean K.
Wisitsoraat A.
Eiamchai P.
Aiempanakit K.
Limnonthakul P.
Nuntawong N.
Pattantsetakul V.
Tuantranont A.
Chindaudom P.
Keywords: Amorphous materials
Annealing
Deposition
Field emission microscopes
Film preparation
Gas sensing electrodes
Magnetron sputtering
Metals
Nanorods
Nitrogen oxides
Scanning electron microscopy
Sputtering
Thin films
Tungsten
X ray diffraction
Crystal structure and morphology
Field emission scanning electron microscopy
Gas sensing applications
Glancing Angle Deposition
Glancing angle deposition technique
Grazing incidence X-ray diffraction
Reactive DC magnetron sputtering
Tungsten trioxide
Crystal structure
วันที่เผยแพร่: 2013
บทคัดย่อ: In this work, the NO2-sensing properties of the tungsten trioxide (WO3) nanorods prepared by dc magnetron sputtering with glancing-angle deposition (GLAD) technique are comparatively studied with that of WO3 thin film deposited by normal sputtering process. The crystal structure and morphologies were characterized by grazing-incidence X-ray diffraction and field emission scanning electron microscopy, respectively. As-deposited WO3 structure deposited at glancing angle of 85? exhibited amorphous crystal structure with uniform isolated columnar nanorod morphology with average length, diameter and spacing between nanorods of around 400 nm, 50 nm and 10 nm, respectively. Annealing at 400 and 500 ° resulted in polycrystalline phase and more porous nanorod network with very large effective surface area. The NO2 sensing response of WO3 nanorods was found to be higher than that of WO3 thin film by a factor of 2-5 depending on operating temperature and gas concentration. In addition, WO3 nanorod annealed at 500 ° exhibited an optimum response of ~27-2.0 ppm of NO2 at 250 °. Therefore, GLAD using reactive dc magnetron sputtering has been demonstrated as a practical method for fabrication of well-aligned metal oxide nanostructures and is potential for gas-sensing applications. © 2012 Elsevier B.V. All rights reserved.
URI: https://ir.swu.ac.th/jspui/handle/123456789/14172
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84872517443&doi=10.1016%2fj.snb.2012.09.077&partnerID=40&md5=ed09986fddd4de5153dfe10a9652b47b
ISSN: 9254005
Appears in Collections:Scopus 1983-2021

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