Publication: Dynamic in situ spectroscopic ellipsometric study in inhomogeneous TiO 2 thin-film growth
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Issued Date
2010
Resource Type
File Type
application/pdf
ISSN
218979
Other identifier(s)
2-s2.0-77955205531
Rights Holder(s)
Scopus
Bibliographic Citation
Journal of Applied Physics. Vol 108, No.1 (2010), p.-
Suggested Citation
Horprathum M., Chindaudom P., Limnonthakul P., Eiamchai P., Nuntawong N., Patthanasettakul V., Pokaipisit A., Limsuwan P. Dynamic in situ spectroscopic ellipsometric study in inhomogeneous TiO 2 thin-film growth. Journal of Applied Physics. Vol 108, No.1 (2010), p.-. doi:10.1063/1.3457839 Retrieved from: https://hdl.handle.net/20.500.14740/7564
Abstract
We investigate the film-growth process of the inhomogeneous sputtered TiO2 thin films by the in situ real-time spectroscopic ellipsometer. The growth process of the film is analyzed by both the uniform and the island film growth models. Based on the analyses from the ψ-Δ trajectories, the initial thin-film growth corresponds to the island film growth model for a single-layer film. As the film grows, the microstructural phase changes cause the transition from the single-to the double-layer physical model, because of the development of the inhomogeneity in the TiO2 thin film. The dynamic fits with the double-layer physical model and the Cody-Lorentz optical model indicate three different stages of the film growth: the nucleation stage, the coalescence stage, and the continuous-layer stage. Although our presented model works well for most of the experimental data, the determination of the refractive index at the ultrathin thickness may be problematic. © 2010 American Institute of Physics.
Subject(s)
Double layers
Dynamic fit
Experimental data
Growth models
Growth process
In-situ
Inhomogeneities
Island films
Lorentz
Micro-structural
Nucleation stages
Optical models
Phase Change
Physical model
Single layer films
Spectroscopic ellipsometers
TiO
Ultra-thin
Coalescence
Dynamics
Ellipsometry
Phase transitions
Refractive index
Thin films
Film growth
Dynamic fit
Experimental data
Growth models
Growth process
In-situ
Inhomogeneities
Island films
Lorentz
Micro-structural
Nucleation stages
Optical models
Phase Change
Physical model
Single layer films
Spectroscopic ellipsometers
TiO
Ultra-thin
Coalescence
Dynamics
Ellipsometry
Phase transitions
Refractive index
Thin films
Film growth