Study of the factors affecting the mechanical, electrical, and piezoelectric properties of PZT micro-actuator

Abstract

The durability, the reliability and the factors leading to the degradation of PZT become more important. The factors initiating the degradation such as crack propagation and environmental conditions were investigated. The dielectric constant and the piezoelectric coefficient, d31 of PZT prior to degradation are 3200 and 15000 pm/V, respectively. After the degradation with crack propagation, the dielectric constant and piezoelectric coefficient, d 31were reduced to 3100, 2400, 1400 and 12000, 11000, 349 pm/V, respectively depend on the degree of crack propagation. In addition, the effect of environmental conditions such as temperature of un-cracked and pre-cracked samples were also investigated and reported. © 2014 Taylor and Francis Group, LLC.