Vertical alignment TiO2 nanotube based on Ti film prepared via anodization technique

Abstract

A highly ordered nanotube TiO2 was successfully prepared from sputtered Ti metal film using anodization process. Ethylene glycol and ammonium fluoride was introduced as the electrolyte solution. The applied of anodizing voltage was systematically controlled between 20-60 volts along fabrication process, respectively. The physical characteristic of the fabricated TiO2 nanotube including anodizing rate, tube diameter and tube width was investigated through the characterization system as field emission scanning electron microscope (FE-SEM). According to cross-section FE-SEM photograph, the anodizing rate and tube width significantly increases when the anodizing voltage was future increased due to higher the electric field. Moreover, the tube diameter directly depends with the anodizing voltage also. The anodizing voltage provides a significant role on the feature of TiO2 nanotube. Finally, the fabricated nanotube TiO2 is potentially promising for Photo-activated application and Nanostructure template. © 2016 Trans Tech Publications, Switzerland.