Publication:
Structural, optical and hydrophilic properties of nanocrystalline TiO 2 ultra-thin films prepared by pulsed dc reactive magnetron sputtering

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Issued Date

2011

Resource Type

Article

File Type

application/pdf

ISSN

9258388

DOI

10.1016/j.jallcom.2011.01.038

Other identifier(s)

2-s2.0-79952280203

Rights Holder(s)

Scopus

Bibliographic Citation

Journal of Alloys and Compounds. Vol 509, No.13 (2011), p.4520-4524

Suggested Citation

Horprathum M., Eiamchai P., Limnonthakul P., Nuntawong N., Chindaudom P., Pokaipisit A., Limsuwan P. Structural, optical and hydrophilic properties of nanocrystalline TiO 2 ultra-thin films prepared by pulsed dc reactive magnetron sputtering. Journal of Alloys and Compounds. Vol 509, No.13 (2011), p.4520-4524. doi:10.1016/j.jallcom.2011.01.038 Retrieved from: https://hdl.handle.net/20.500.14740/7354

Title

Structural, optical and hydrophilic properties of nanocrystalline TiO 2 ultra-thin films prepared by pulsed dc reactive magnetron sputtering

Author(s)

Horprathum M.
 Eiamchai P.
 Limnonthakul P.
 Nuntawong N.
 Chindaudom P.
 Pokaipisit A.
 Limsuwan P.

Abstract

TiO2 ultra-thin (15 nm) films were deposited on silicon wafers (100) and glass slides by pulsed dc reactive magnetron sputtering in an ultra-high vacuum (UHV) system. The effects of substrate temperature, from room temperature to 400 °C, on structural, optical, and hydrophilic properties of the obtained films have been investigated. The structure of the films was characterized by grazing-incidence X-ray diffraction, high-resolution transmission electron microscopy, and atomic force microscopy. The optical properties were determined by UV-vis spectrophotometer and spectroscopic ellipsometry. The hydrophilic properties of the films, after exposed to ultraviolet illumination, were analyzed from contact angle measurements. The results suggested that the substrate temperature at 300 °C was critical in the crystalline phase transformation from amorphous to anatase in the TiO 2 films. The obtained films exhibited good qualities in the optical properties, in addition to excellent photo-induced hydrophilic activities. © 2011 Published by Elsevier B.V.

Subject(s)

Crystalline phase transformation
 Glass slides
 Grazing incidence X-ray diffraction
 Hydrophilic properties
 Nanocrystalline TiO
 Photo-induced
 Photo-induced hydrophilic
 Pulsed DC
 Room temperature
 Substrate temperature
 TiO
 Ultra-thin
 Ultraviolet illumination
 UV-Vis spectrophotometers
 Angle measurement
 Atomic force microscopy
 Contact angle
 Crystal atomic structure
 DC power transmission
 High resolution transmission electron microscopy
 Hydrophilicity
 Oxides
 Semiconducting silicon compounds
 Silicon wafers
 Spectroscopic ellipsometry
 Titanium
 Titanium dioxide
 Ultrathin films
 X ray diffraction
 Optical properties

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URI

https://hdl.handle.net/20.500.14740/7354

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Scopus: Year 1983-2021

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