Please use this identifier to cite or link to this item: https://ir.swu.ac.th/jspui/handle/123456789/17395
ชื่อเรื่อง: Effects of Annealing Temperature on Crystal Structure and Microstructure of PZT Thin Films (52/48) Prepared by RF Magnetron Sputtering
ผู้แต่ง: Thongrit P.
Horprathum M.
Pengpat K.
Bintachitt P.
Keywords: Annealing
Chromium
Energy dispersive spectroscopy
Film preparation
Film thickness
Lead compounds
Perovskite
Perovskite solar cells
Phase composition
Silicon
Thin films
Annealing temperatures
Ceramic target
Crystals structures
Effect of annealing
PZT thin-film
R.F. magnetron sputtering
Si substrates
Structure and microstructures
Thin-films
XRD studies
Magnetron sputtering
วันที่เผยแพร่: 2021
บทคัดย่อ: In this research, the effects of annealing temperatures on the crystallization and morphology of Pb(Zr0.52Ti0.48)O3 (PZT) thin films on (111) Pt/Ti/SiO2/(100)Si and (111) Au/Cr/(100)Si substrates prepared by RF magnetron sputtering were investigated. Two types of thin films: PZT/Pt/Ti/SiO2/Si and PZT/Au/Cr/Si were obtained from a Pb(Zr0.52Ti0.48)O3 ceramic target and were annealed at different temperatures of 600 °C, 650 °C, and 700 °C for 1 h, in air, with heating rate of 5 °C/min. The XRD studies showed that the crystal structures of the PZT thin films could be affected by varying annealing temperatures. The annealed PZT thin films exhibited perovskite structures that crystallographic orientations increased remarkably with annealing temperatures. Phases of PZT thin films on two types of substrates oriented differently. The FE-SEM images along with energy dispersive spectroscopy (EDS) studies confirmed the homogeneous and compact films. The increase of annealing temperatures virtually caused the decrease of PZT thin-film thickness, increase of densification of the films, and increase of PZT grain size. Moreover, the phase composition state of the PZT thin films changed quantitatively with increase in annealing temperatures. The dielectric, ferroelectric and piezoelectric properties of PZT thin films will be further investigated. © 2021 Taylor & Francis Group, LLC.
URI: https://ir.swu.ac.th/jspui/handle/123456789/17395
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85122060217&doi=10.1080%2f10584587.2021.1964296&partnerID=40&md5=bc4d407200ff354bb29a5274057a05c9
ISSN: 10584587
Appears in Collections:Scopus 1983-2021

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