Please use this identifier to cite or link to this item: https://ir.swu.ac.th/jspui/handle/123456789/14549
ชื่อเรื่อง: Structural, optical and hydrophilic properties of nanocrystalline TiO 2 ultra-thin films prepared by pulsed dc reactive magnetron sputtering
ผู้แต่ง: Horprathum M.
Eiamchai P.
Limnonthakul P.
Nuntawong N.
Chindaudom P.
Pokaipisit A.
Limsuwan P.
Keywords: Crystalline phase transformation
Glass slides
Grazing incidence X-ray diffraction
Hydrophilic properties
Nanocrystalline TiO
Photo-induced
Photo-induced hydrophilic
Pulsed DC
Room temperature
Substrate temperature
TiO
Ultra-thin
Ultraviolet illumination
UV-Vis spectrophotometers
Angle measurement
Atomic force microscopy
Contact angle
Crystal atomic structure
DC power transmission
High resolution transmission electron microscopy
Hydrophilicity
Oxides
Semiconducting silicon compounds
Silicon wafers
Spectroscopic ellipsometry
Titanium
Titanium dioxide
Ultrathin films
X ray diffraction
Optical properties
วันที่เผยแพร่: 2011
บทคัดย่อ: TiO2 ultra-thin (15 nm) films were deposited on silicon wafers (100) and glass slides by pulsed dc reactive magnetron sputtering in an ultra-high vacuum (UHV) system. The effects of substrate temperature, from room temperature to 400 °C, on structural, optical, and hydrophilic properties of the obtained films have been investigated. The structure of the films was characterized by grazing-incidence X-ray diffraction, high-resolution transmission electron microscopy, and atomic force microscopy. The optical properties were determined by UV-vis spectrophotometer and spectroscopic ellipsometry. The hydrophilic properties of the films, after exposed to ultraviolet illumination, were analyzed from contact angle measurements. The results suggested that the substrate temperature at 300 °C was critical in the crystalline phase transformation from amorphous to anatase in the TiO 2 films. The obtained films exhibited good qualities in the optical properties, in addition to excellent photo-induced hydrophilic activities. © 2011 Published by Elsevier B.V.
URI: https://ir.swu.ac.th/jspui/handle/123456789/14549
https://www.scopus.com/inward/record.uri?eid=2-s2.0-79952280203&doi=10.1016%2fj.jallcom.2011.01.038&partnerID=40&md5=3568d0745555c504ec2129a66ea4e3eb
ISSN: 9258388
Appears in Collections:Scopus 1983-2021

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