Growth of nanostructure TiO2 films by glancing angle deposition

Abstract

Nanostructure TiO2 films were prepared by electron beam evaporation with glancing angle deposition technique at room temperature. The morphology, crystal structure and optical properties at various substrate rotation speeds (0-10 rpm) were investigated by field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD) and UV-vis spectrophotometer. The cross-section FE-SEM images illustrate that the nanostructures consist of different morphology: slanted columnar, spiral and vertical align nanorods at 0, 0.01 and 10 rpm-rotation speed, respectively. In particular, the rotation speed-controlled incoming vapor flux was found to play crucial role in the growth of nanostructure TiO2 films. © 2016 Trans Tech Publications, Switzerland.