Thongrit P.; Horprathum M.; Pengpat K.; Bintachitt P.
(2021)
In this research, the effects of annealing temperatures on the crystallization and morphology of Pb(Zr0.52Ti0.48)O3 (PZT) thin films on (111) Pt/Ti/SiO2/(100)Si and (111) Au/Cr/(100)Si substrates prepared by RF magnetron ...